Thermal Emission Microscope

THEMOS mini is thermal emission microscope with a high-sensitivity InSb camera that detects internal heat emissions from a semiconductor device. By displaying the detected thermal image superimposed onto the pattern image, THEMOS mini quickly indicates failures in the semiconductor device with high positional accuracy.

Catalog(PDF540KB)

Product Information

FEATURES
･  High  sensitivity  thermal  detector  (InSb)  used
･  Optimally  designed  IR  optics
･  Analysis  of  thermal  emissions  image  through  the  backside
･  200  mm  wafer  chuck  as  standard

APPLICATIONS
･  Short-circuit  of  metalization
･  Abnormality  of  contact  holes
･  Microplasma  leakage  in  oxide  layer
･  Oxide  layer  breakdown
･  TFT  leakage  /  Organic  EL  leakage  location  detection
･  Observation  of  temperature  abnormalities  in  devices  during  the  development  of  new  semiconductor  devices
･  Temperature  mapping  of  semiconductor  materials  and  PC  board