Emission Microscope

The PHEMOS Series Emission Microscope is a group of semiconductor failure analysis tools that detect faint emissions caused by semiconductor device anomalies to specify the failure location.
They can be used on anything from memory and logic devices to power and flat-panel devices.
They have a wide range of applications, from failure analysis in the design stage to defective product analysis in the field.

Catalog(PDF976KB)

Product Information

FEATURES
･  300  mm  double  side  semi-automatic  prober  loading  possible
･  High  resolution  and  high  sensitivity  observations  using  a  SIL
･  CAD  navigation  benefits  from  high  positioning  precision
･  Improved  S/N  ratio  with  the  lock-in  detection  OBIRCH  amplifier  (optional)
･  OBIRCH  analysis  function  loaded
･  High  sensitivity  observations  of  low  voltage  samples  with  the  MCT  camera  (optional)
･  IR-confocal  microscope  loaded

APPLICATIONS
･  Locating  of  an  ESD  destructive  point
･  Latch-up  analyses,  such  as  CMOS
･  Short-circuit  and  penetration  current  of  FET  depended  openly
･  Failure  analysis  under  a  LOC  package  or  multilayer  metal  wiring
･  Wiring  failure  analysis  by  the  OBIRCH  method
･  Failure  analysis  of  a  flat  panel  display