The L10366 series are newly developed VUV (vacuum UV) light source units. This product uses a "high-brightness deuterium lamp with MgF2 window" that produces a high radiant intensity 4 times higher than conventional model. This product is now a lot easier to handle due to use of an air-cooled structure and vacuum flange mount.
High Radiant Intensity: 4 Times (compared to conventional model)
High VUV Intensity Down to 115 nm
Air Cooling (needs no cooling water)
External Control (lamp ON/OFF, lamp ON status signal)
No Optical Axis Alignment Required
APPLICATIONS
Spectrophotometer, Fluorophotometer
Electrostatic Removal of Semiconductor Wafer, LCD Panel, etc.
Photoionization Detector (PID)
UV Resistance Testing of Various Material
Optical Chemical Vapor Deposition (optical CVD)
Excitation Light Source
ARC DISTRIBUTION (at 230 nm)
PACKAGE CONTENTS
SOECIFICATIONS
SPECTRAL DISTRIBUTION (VUV region ; for reference only)