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The Optical NanoGauge is a film thickness measurement system utilizing spectral interferometry. Film thickness is recorded quickly and non-destructively by means of white light illumination. Spectral content of reflections from both thin film surface and substrate interface are analyzed by a curve fitting and FFT (fast fourier transfer) technique.
A photonic multichannel analyzer (PMA) is used as the detector to measure the spectral content with high sensitivity and high accuracy. To meet a wide range of applications, the Optical NanoGauge series is available such as macro measurements (C10178) and micro measurements (C10323).
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