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FEATURES ・ Extraction of the NETs passing through a region by setting signal locations (photoemission, OBIRCH and/or thermal emission signatures) as ROIs. ・ The extracted NETs are sorted according to the number of regions they pass through, making it easier to narrow down the NETs responsible for the detected signal. ・ By seamlessly integrating failure analysis signal data for multiple sources with CAD information, FA-Navigation rapidly narrows down the selection of candidate failure sites with high precision. ・ Three images, the data image (photoemission, OBIRCH and/or thermal data from DUT), the pattern image and CAD layout image, are superimposed and displayed as a single image.
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