Inverted Emission Microscope

The inverted emission microscope "iPHEMOS" is a semiconductor failure analysis system developed specifically for backside analysis of semiconductor devices. Emission analysis, thermal analysis, IR-OBIRCH analysis, and time-resolved emission analysis are capable simply by selecting a detector. Dynamic analysis is available by tester direct docking. Combining with a backside observation prober, the system carries out measurements from whole wafer to a single die as needed.

Catalog(PDF 452KB)

Product Information

FEATURES
･  Simplified  tester  head  docking  for  dynamic  analysis
･  Multi-camera  platform  incorporating  high  precision  stage  optimized  for  backside  observation.
･  Multiple  detectors  suitable  for  observing  low  voltage  operating  IC.
･  System  design  flexibility  corresponding  to  the  measurement  of  advanced  ICs.
･  Variety  of  lens  selection  from  1x  to  100x  (Optional  10  lens-hole  turret  available.)
･  Backside  observation  prober  available  for  measurements  from  an  entire  300  mm  wafer  to  a  single  die.

OPTIONS
･  NanoLens  for  high-resolution  and  high-sensitivity  observation
･  OBIRCH  analysis  function
･  Use  of  digital  lock-in  kit  enhances  the  OBIRCH  analysis  detection  functions
･  Dynamic  analysis  function  by  laser  radiation
･  Failure  analysis  support  system